Method and device for calibrating return compensation type four-optical-axis angular displacement laser interferometer

回位补偿式四光轴角位移激光干涉仪校准方法与装置

Abstract

A method and a device for calibrating a return compensation type four-optical-axis angular displacement laser interferometer belong to the technical field of laser measurement. Four measurement light beams of the calibrated laser interferometer penetrate through a middle through hole of a four-axis hollow laser interferoscope group; the four measurement light beams of the calibrated laser interferometer are arranged in the middle positions of four parallel standard measurement light beams in parallel; the perpendicular distance between the standard measurement light beams and the measurement light beams of the calibrated laser interferometer is very small, and the air refractive index of the standard measurement light beams is extremely close to that of the measurement light beams of the calibrated laser interferometer; an average derived displacement value is measured by a micro-motion device according to four light beam position detectors to carry out return compensation on the derived displacement of a target reflector in real time, so that the incidence positions of the measurement light beams on the reflecting surface of the target reflector do not vary.
回位补偿式四光轴角位移激光干涉仪校准方法与装置属于激光测量技术领域,本发明将被校准激光干涉仪四条测量光束穿过四轴中空激光干涉镜组的中间通孔,四条被校准激光干涉仪测量光束平行置于四条平行标准测量光束中间位置;标准测量光束与被校准激光干涉仪测量光束垂直距离很小,标准测量光束与被校准激光干涉仪测量光束空气折射率值非常接近;微动装置根据四个光束位置探测器测量出衍生位移的平均值,对目标反射镜衍生位移进行实时回位补偿,使目标反射镜反射面上测量光束的入射位置不发生变化。

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